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This article describes the progress made during the first project year of the FP7 EU-project MEMS-4-MMIC that focuses on the merging of innovative RF-MEMS switch designs with established MMIC-technology. The ultimate goal is to include RF-MEMS switches into a standard commercial foundry process. Such switches will then become standard building blocks for MMIC circuits such as transistors, resistors...
A fully monolithic oscillator achieved via MEMS-last integration of low temperature nickel micromechanical resonator arrays over finished foundry CMOS circuitry has been demonstrated with a measured phase noise of -95 dBc/Hz at a 10-kHz offset from its 10.92-MHz carrier (i.e., output) frequency. The use of a side-supported flexural-mode disk resonator-array to boost the power handling of the resonant...
MEMS (microelectromechanical systems) or nanotechnology is expected as one of the most promising R&D fields for the future business success, as MEMS or nanotechnology has a variety of applications from electronics to bio-technology. However R&D investment to MEMS facility is too heavy even for the large scale companies. Although MEMS foundry services by private companies have been introduced...
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