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We propose a novel Vth, control method for HfSiON (or HfO2) with poly-Si and metal inserted poly-Si stacks (MIPS) gates. By using a selective AlOx etch (SAE) process, we successfully integrate dual high-k gate oxide scheme; HfSiO/poly-Si stack for nMOS and HfSiO/AlOx/poly-Si stack for pMOS. Therefore, symmetrical Vth values of 0.43V(nMOS)/-0.44V (pMOS) have been obtained in poly-Si gate. For MIPS...
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