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In this research, piezoelectric micromachined ultrasonic transducer (pMUT) array was used for stimulation of mechanosensitive channel of HEK293T cells. The fabricated pMUT array was made by microelectromechanical system (MEMS) technology such as photo process, etching, sputtering, and sol-gel method. The resonance frequency and acoustic positive peak pressure were 2.07 MHz and 3.94 kPa, respectively...
Piezoelectric micromachined ultrasonic transducer (pMUT) gains increasing interests from researchers. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer (cMUT), which is potential to be integrated into portable...
This paper presents the vibration behavior of the miniature circular piezoelectric micromachined ultrasonic transducers (pMUTs) under water for the first time As the results of the FSI analysis, the vibration modes and resonant frequencies were successfully observed and compared to the scanning LDV measurements. According to these result, some vibration mode and resonant frequencies were appeared...
Improvements in thin-film piezoelectric materials such as AlN and PZT enable piezoelectric micromachined transducers that are superior to existing capacitive transducers. This paper presents the basic design equations, equivalent circuit model, and fabrication processes for piezoelectric micromachined ultrasonic transducers (PMUTs) operating in fluid or air. Relative to conventional ultrasonic transducers,...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach to form high frequency arrays for real-time 3-D medical imaging. pMUT arrays based on SOI-Si bonding and PZT-coated membrane structures have been designed in this paper. After simulation, the 6×6 ultrasonic transducer array was fabricated and characterized. The total array area is approximately 2.0 mm by 2.0 mm. The micrograph...
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