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In this letter, we describe a novel micromachined thermopile infrared (IR) detector module with filter and detector cointegrated by Au-Au thermocompression vacuum bonding technology. To miniaturize the detector module, both the thermopile IR detector and filter were fabricated by the silicon process, and the cap silicon wafer as the optical filter was bonded with the thermopile IR detector wafer in...
In the field of manufacturing of micro-system, the Pyrex7740 glass is a widely-used material since its coefficient of thermal expansion is similar to that of silicon and it has good optical performance for optical sensors and actuators. The use of Pyrex7740 glass is limited by its isotropic etching characteristic. In this paper, a new wafer-level process to precisely fabricate deep cavities on the...
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