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Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its competitive cost and proven performance. In our research, MEMS pressure sensor for biomedical application is investigated. There are a number of stages involved in our research for implementation...
This paper presents a new implementation of integrated tunable inductors using mutual inductances activated by micromechanical switches. To achieve a large tuning range and a high quality factor, silver was used as the structural material, and silicon was selectively removed from the backside of the substrate. Using this method, a maximum tuning of 47% at 6 GHz is achieved for a 1.1 nH silver inductor...
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