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This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating...
In this study, we fabricated in-plane thermoelectric micro-generators (4 mm times 4 mm) based on bismuth telluride thin films by using flash evaporation method. The thermoelectric properties of as-grown thin films are lower than those of bulk materials. Therefore the as-grown thin films were annealed in hydrogen at atmospheric pressure for 1 hour in a temperature range of 200 degC. to 400degC. By...
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