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Journal of Microelectromechanical Systems > 2009 > 18 > 4 > 962 - 970
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321
Journal of Microelectromechanical Systems > 2009 > 18 > 4 > 962 - 970
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321