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Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 513 - 515
IEEE Sensors Journal > 2008 > 8 > 7 > 1268 - 1272
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 513 - 515
IEEE Sensors Journal > 2008 > 8 > 7 > 1268 - 1272