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Multiple modes excited in a single solidly-mounted ZnO bulk acoustic resonator would provide a multi-band resonator operating at non-harmonically-related frequencies in the GHz range. Ordinarily, separate devices with different electrode and reflector designs are needed to excite the thickness shear (TSM) and thickness-extensional (TE) bulk acoustic modes, each device optimized for a single mode....
This paper reported modeling and theoretical characterization of circular piezoelectric micromachined ultrasonic transducer (pMUT) for immersion applications. Zinc oxide (ZnO) was employed as piezo active material and nickel aluminum bronze alloy UNS C63000 (CuAl10Ni5Fe4) also known as “sea bronze”, was introduced as electrodes. First, virtual fabrication process was carried out within software environment...
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