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This paper reports on a new type of micro-resonators enabled by micromachining of ion sliced X-cut LiNbO3 thin films. In operation, the device is excited into lateral vibrations, thus allowing the center frequency to be determined by the lithographically defined dimensions of the excitation electrodes. This configuration enables highly integrated single-chip multi-frequency solutions for future wireless...
For the first time, high overtone bulk acoustic resonators (HBAR) based on thin homogeneous and single crystalline films (below 1mum) of lithium niobate (LiNbO3) have been processed and characterized between 1 and 4 GHz. kt2 greater than 30% are extracted from the frequency response envelope, by far superior to kt2 usually obtained with traditional deposited AlN material (limited to 7%). This result...
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