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For the first time, high overtone bulk acoustic resonators (HBAR) based on thin homogeneous and single crystalline films (below 1mum) of lithium niobate (LiNbO3) have been processed and characterized between 1 and 4 GHz. kt2 greater than 30% are extracted from the frequency response envelope, by far superior to kt2 usually obtained with traditional deposited AlN material (limited to 7%). This result...
We apply Design of Computer Experiments methods to the simulation of piezoelectric stacks and the design of BAW resonators and filters. Through the example of DCS filters with two different technologies (Iridium and Molybdenum electrodes), we show that the definition and the exploitation of a metamodel can accurately replace acoustic simulations and allows therefore a much faster material stack design.
A novel concept for shear mode Bulk Acoustic Resonators (BAR) is presented. It is based on c-axis oriented AlN thin films grown on silicon dioxide thin films, combined with interdigitated electrodes. Such a structure leads to an excitation of mainly shear mode displacements in the AlN film. However, a more pure mode is expected if only every second electrode section would contain active AlN, thus...
Bulk-Acoustic-Wave (BAW) filters are on their way to replace conventional RF-filters in major wireless communication standards such as PCS, WCDMA, WiFi, or WiMAX. The main advantage is a performance which is unmatched by SAW filters or ceramic filters, while maintaining low manufacturing costs. In order to achieve excellent device characteristics, regardless if this device is a simple band pass filter...
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