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Recent computational methods of wafer defect detection often rely on the difference image between an inspected image and its reference image, and highly depend on registration accuracy. In this paper, we present a novel method for defect detection in patterned wafers, based on of the inspected image from the reference image using anisotropic kernels. This method avoids registration between the inspected...
A new metric for anomaly detection in hyperspectral imagery is developed to account for anisotropic heavy tails in covariance-whitened data. The anisotropy, consisting of a variation in tail heaviness with principal component number, commonly occurs when the number of linearly independent components representing the data to within the noise level is less than the number of data dimensions. The detection...
Live-Cell Assays are used to study the dynamic functional cellular processes in high-content screening of drug discovery processes. One class of tasks in this application is the tracking of cells and the description of the events and the changes in the cell characteristics. The large amount of data requires fast processing algorithms and compact object and event descriptions. We propose in this paper...
In this paper, we present a new and automated technique to extract defects in photomask images. To correctly extract defects, we propose a robust automated method based on second order moment (SOM) between reference and test images and a statistical model based on difference image are used. The statistical model is distribution of the normalized absolute difference value (ADV) between reference and...
Archaeological sites vary greatly in terms of type, size, and material composition. They have in common only that they humanly caused perturbations of what would otherwise be a landscape ordered by natural causes. Protocols are presented in this paper for detecting archaeological sites that can be characterized generally as positive as opposed to normative, in the way that these two terms are used...
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