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Usually the analytical approach for modeling CMUTs uses the single layer plate equation to obtain the deflection and does not take anisotropy and residual stress into account. A highly accurate model is developed for analytical characterization of CMUTs taking an arbitrary number of layers and residual stress into account. Based on the stress-strain relation of each layer and balancing stress resultants...
We use finite element analysis (FEA) to model capacitive micromachined ultrasonic transducer (CMUT) cells where stress stiffening affects static deflection, pull-in voltage, resonance frequency, and small-signal sensitivity. Determining the small-signal sensitivity is challenging because it requires a prestressed harmonic response analysis in which the geometric nonlinearities are activated during...
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