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An alternative method of analyzing time-dependent dielectric breakdown (TDDB) data for low-k dielectrics is presented. The analysis shows that time to breakdown is well correlated to the Poole-Frenkel emission equation, and therefore the radicE-model is a more accurate model in describing the TDDB physics for low-k BEOL dielectrics.
Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack (HfAlOx/SiO2) were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional SiO2. For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer...
In this paper, the method of Spatial Fourier Transform has been used to investigate the pattern formation dynamics in a dielectric barrier discharge (DBD) system. With this method, patterns formed in the DBD system can be transformed into smooth frequency spectrum. The frequency constitution of discharge pattern can be analyzed. In our experiment mixed gas of 96% Ar and 4% air at 0.9 atm is used as...
A numerous experiments were carefully carried out to study the effect of temperature on the anomalous breakdown characteristics of perspex, teflon an backlite. From the forgoing Sections of this paper, the following conclusions can be presented in brief as follows.
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