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A novel design of switched-line RF-MEMS (radio frequency micro electro mechanical systems) phase shifter for the X-Ku band (8 ~ 18 GHz) has been successfully developed by monolithically integrating electrostatic micro actuation mechanism of MEMS with a movable coplanar waveguide made of single crystalline silicon. MEMS and RF designs have been performed with minimum geometrical conflicts thanks to...
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