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This paper reports on the co-fabrication of RF MEMS radial contour mode resonators and photonic whispering gallery mode disk resonators on the same SOI substrate. By mechanically coupling the MEMS and photonic resonators, we have demonstrated a silicon acousto-optic modulator (AOM) which can modulate a 1550 nm laser at 288 MHz. An output RF power of -83.7 dBm is observed corresponding to a modulation...
We demonstrate a 20-/spl mu/m-long tunable optical Fabry-Perot resonator integrated on a silicon-on-insulator waveguide. The device is electrically driven and shows a modulation depth as high as 53% for a power consumption of only 20 mW.
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