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Carbon nitride films deposited onto room temperature silicon substrates by ArF excimer laser ablation of a graphite target in nitrogen atmosphere have been investigated after floating off in transmission electron microscope (TEM). All films fabricated in the 1–100Pa N 2 pressure and 1–10Jcm −2 fluence domain are amorphous. It is the nitrogen pressure that governs both the composition...
The effect of N 2 pressure and laser fluence on the chemical composition and growth rate of CN x (0.07<x<0.45) films deposited by ArF excimer laser ablation of a graphite target in nitrogen environment is reported. Between 1 and 50Pa the nitrogen content of the films monotonously increases with increasing pressure. Films deposited at various N 2 pressures differ not only...
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