The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
With the development of the miniaturization of ammunition fuze, the MEMS (Micro-electromechanical Systems) technology is becoming increasingly important. In this paper, the energy statistical method is applied to MEMS-based S&A (safety and arming) system. Taking the quality of slider, stiffness of micro-spring, size of latch mechanism and the initial offset distance into a count, the energy conversion...
This paper evaluates the performance characteristics of two tunneling accelerometers having cantilever and proof mass moving structures of similar dynamic response ranges. Design and optimization of the two structures have been carried out aiming aerospace and satellite application. Both the structures have been fabricated using surface micromachining process. Different performance parameters of the...
In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.
The fault analysis for the electrostatic parallel-plate is a critical issue in the design flow, as it played an important role in determining device reliability and the voltage required for successful operation. The simulations for pull-in and release voltages were carried in CoventorWare. The FEM model was constructed. The displacement of the upper electrode and corresponding capacitance between...
A new kind of sensor for measuring force in arbitrary direction to test force's value and direction with a dimension Oslash53 mm times h8.2 mm, developed for dental surgery measurement, has been proposed in this article. A four-beam structure is employed for arbitrary force test. Based on material theory the value and direction of force can be calculated by strain test. A matrix that proves the four-beam...
This paper presents a modeling of lateral electrostatic comb drive actuator and develops a 2D finite element model using reduced order modeling (ROM) principles to analyze the coupled field. This technique reduces the comb drive to a group of equivalent lumped parameters finite elements which capture the device behavior. Finally, Simulation results are validated using an analytical approach, both...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.