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MEMS (Micro-Electro-Mechanical Systems) have been used widely in almost all the major industries, while few companies have commercial products in MEMS gyroscope. Besides, there are not many papers on the sensor design, and the papers regarding the packaging for gyroscopes are few, partly due to its highly proprietary nature [1]. The fabrication imperfections are unavoidable during MEMS gyroscope manufacture...
This paper reports the design and simulation results of the symmetrical and decoupled CMOS-MEMS gyroscope that utilizes the vertical capacitance change between the proof mass and sensing electrode. In order to reduce the lateral curling, a special beam with inversed-tapered cross-section has been designed. The gyroscope is fabricated through a standard 0.35 mum 2P4M CMOS-MEMS process. The dynamical...
Micro electro mechanical systems (MEMS) technology has developed considerably in recent years and many sensors utilizing this technology are available in the market. MEMS technology enables miniaturization, mass production, and cost reduction of many sensors. In particular, MEMS inertial sensors that include an acceleration sensor and an angular velocity sensor (gyroscope, or simply ldquogyrordquo)...
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