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To measure the resistivity distribution of semiconductor wafers, this article applies electrical impedance tomography (EIT) technology to semiconductor resistivity measurements. A new method of Image reconstruction algorithm based on RBF neural network for EIT is proposed. The particle swarm optimization algorithm (PSO) is designed to optimize the RBF network's connection weights. The simulation experiment...
A previously proposed approach based on RBF neural networks for detecting anomaly location is extended to estimate the anomaly size. First, a predefined number of threshold values are selected in the range of possible anomaly sizes. Next, RBF neural networks are used as classifiers to classify the anomaly size as being smaller or larger than each threshold value. The inputs of the classifiers are...
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