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This work presents a radio frequency microelectromechanical system (RF MEMS) based single-pole-nine-throw (SP9T) switch integrated with an antenna at 60 GHz. The device is fabricated on 635 µm alumina substrate using surface micromachining process. SP9T switch features a simulated return loss of > 14 dB, isolation of > 16 dB and insertion loss of ≤ 0.41 dB over the frequency band of 55–65 GHz...
This paper reports on design, fabrication, and characterization of a novel multistage all-silicon microwave MEMS phase-shifter concept, based on multiple-step deep-reactive-ion-etched monocrystalline-silicon dielectric blocks which are transfer bonded to an RF substrate containing a 3-D micromachined coplanar waveguide. The relative phase shift of 45?? of a single stage is achieved by vertically moving...
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