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This paper reports on the first demonstration of an innovative approach to switching and reconfiguration of Aluminum Nitride (AlN) piezoelectric Micro Electro Mechanical System (MEMS) resonators using phase change material (PCM) programmable vias. A reconfigurable resonator prototype was fabricated by integrating 2 Ge50Te50 vias in the design of a 200 MHz contour-extensional mode resonator. The capability...
In this paper, radio-frequency micro-electro-mechanical systems (RF MEMS) technology and applications are presented. Use of MEMS resonators are described. Circuit's model of RF-receiver using mechanical components and vibrating micromechanical resonator model which is used in RF architecture is presented. Finally, some general conclusions are given in this paper.
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