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In this paper, we present the fabrication of micro cantilevers and the extraction of the transverse piezoelectric coefficient d31. Micro cantilevers were fabricated on SOI wafers by surface micromachining processes. By controlling the crystallization conditions, 2 µm-thick (100) and (111) highly oriented PZT films were obtained. Piezoelectric properties were compared according to two crystalline orientations...
The large-displacement, low-voltage and fast response are the research direction of the micro actuator. The micro actuator of the electrostatic transverse loading exist problems of the oversized voltage or undersized displacement. The model of a large-displacement low-voltage micro actuator is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed...
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