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We report a novel microfluidic surface-enhanced Raman scattering (SERS) device, which is achieved by bonding a polydimethylsiloxane cap with a microchannel structure onto an SERS-active substrate composed of noble-metal covered silicon nanopillar forests. The silicon nanopillar forests are fabricated by using nanomaterial dots, which are introduced in oxygen-plasma bombardment of photoresist, as etching...
Transmission electron microscopes (TEMs) and scanning transmission electron microscopes (STEMs) are powerful tools for imaging on the nanoscale. These microscopes cannot be typically used to image processes taking place in liquid media because liquid simply evaporates in the high-vacuum environment of the microscope. In order to view a liquid sample, it is thus necessary to confine the liquid in a...
Direct patterning of silicon dioxide by electron beam lithography is used for the definition of metal nanojunction on wires fabricated on silicon on insulator (SOI) substrates. Devices based on a single silicon nanowire as small as 15 nm and several micrometers long are fabricated by means of a top down process based on electron beam lithography, silicon anisotropic etching and thermal oxidation....
Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nano-technology. Controlled, reproducible operation on the nano-scale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between...
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