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A solid-electrolyte switch (ldquoNanoBridgerdquo) has been successfully embedded into a 0.13-mum-node dual-damascene Cu interconnect using a highly reliable bilayer solid-electrolyte (TaSiO/Ta2O5) and a thin oxidation barrier, resulting in an excellent ON/OFF ratio (> 109) at a low ON resistance of 50Omega. The newly developed bilayer solid-electrolyte has improved the thermal stability during...
Electrical and mechanical subjects are investigated to design and manufacture high voltage vacuum interrupters (HV VIs). In electrical aspects, vacuum breakdowns are experimented to rod-plane and plane-plane models with stainless steel (SUS) and gaps. To overcome the defects of HV VIs in tank-type vacuum circuit breakers, outer shields are proposed. Mechanically, since HV VIs are large and have a...
Computational modeling of emitter heating by thermo field emission current has been used for the estimation of electric strength of vacuum insulation. The distribution of temperature for tungsten, molybdenum, copper, iron and aluminum emitters has been received upon influence of rectangular and oblique-angled voltage pulses in the range of electric field intensity from 6.6times109 V/m up to 1.4times10...
In vacuum circuit breakers (VCB) the presence of the metal vapour in the switching gap, following the interruption of high currents, is a source of limitation of dielectric performance during the recovery period. The temperature of the contacts is still high after current extinction, and metal vapour continues to evaporate from the contacts. Breakdown can initiate for metal vapour density at the condition...
A lot of microdischarges in liquid are proposed and studied. It is a new frontier of plasma and is expected as a peculiar reaction field. Discharge process in electric discharge machinings (EDMs) is related to the physics of the pulsed micro-arc discharge in liquid. EDMs are well-known machining techniques developed since more than sixty years. However, the microdischarge between a workpiece and a...
Metal ignition wires are widely used in power arc tests on insulator sets and similar. Finer metal ignition wires are preferred from the point of view of influence on the apparatus tested. However, if the metal ignition wires are too fine, the arc cannot be sustained. To perform power arc tests successfully, therefore, they need to have some degree of thickness. With these requirements in mind, we...
A contact process between large-scale integration (LSI) pads and test probes at low contact force is a key to developing a probe card with smaller pitch and higher pin count. In this paper, we report on the characteristics of low-force contact methods on Cu electrodes. One is the fritting process, in which an electric breakdown is utilized to break the surface oxide, and the other is the heating treatment...
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