The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper reports ultra-wide tuned RF micro-electro mechanical systems (MEMS) tunable capacitor using netted membrane structure for highly miniaturized and reconfigurable RF devices and systems applications. The proposed capacitor is also designed to achieve high linearity and capacitance values for commercial applications. Since the netted membrane is stuck to the dielectric layer of the bottom...
This paper presents the design and manufacturing of a novel Dual Gap MEMS varactor which operates before the pull-in ensuring continuous tuning range. The device is based on interdigitated DC and RF electrodes, allowing uniform distribution of the electrostatic force. The tunable capacitor has been embedded in the BEOL (Back End Of Line) metallization stack of a state of the art Si/SiGe BiCMOS semiconductor...
High Power handling capabilities are not the main focus in MEMS varactor research and development. In this paper MEMS varactors with excellent RF power handling capabilities of up to 16 VPP for application in low noise wideband RF VCOs (Voltage controlled oscillators) have been designed, fabricated and characterized. These MEMS varactors are embedded in the BEOL (Back end of line) metallization stack...
This paper presents a MEMS surface micro-machined varactor. The dynamic range of this class of varactors is governed by pull-in instability which is ideally one-third of the initial gap between the two electrodes. This paper presents a simple T varactor, whose pull-in stability and hence its dynamic range are increased by applying two independent voltage sources. We introduce an electromechanical...
This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing...
This paper presents a novel wide tuning range MEMS varactor based on a toggle push-pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.