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A novel stretchable Micro-Electrode Array (MEA) for biomedical applications with robust spiraled interconnects and radial micro-grooves for cell alignment is presented, enabling the unique combination of alignment, mechanical stimulation, and electrical characterization of living cells. Many of the problems normally associated with the fabrication of interconnects and electrodes on stretchable PDMS...
We report on miniaturized diaphragm dielectric elastomer actuators (DEAs) capable of vertical displacement up to 25% of their diameter. Low-energy metal ion implantation was used to create patternable and compliant gold electrodes on both sides of suspended 30 mum thick silicone (PDMS) membranes. This technique enables the microfabrication of bucking-mode actuators capable of out-of-plane displacement...
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