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In this work, we investigate in a Hardware-in-the-Loop (HiL) approach to solve the problems and opportunities created by the control of large numbers (hundreds to thousands) of MEMS sensors and actuators. Using HiL simulation, one or several devices of the system are used instead of their simulated models. HiL simulation is supposed to achieve a highly realistic simulation of equipment in an operational...
The following topics are dealt with: electron devices; materials, technology and process simulation; devices simulation; characterisation and reliability; sensors, actuators and MEMS; photovoltaic, optoelectronic devices and displays; micro and nano-devices; RF microwave and power devices.
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