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This paper presents a system to monitor the presence of trace moisture in SF6 gas insulated switchgear (GIS) employing a micro-cantilever sensor. The main objective of the proposed system design is to continuously monitor the moisture concentration inside the GIS for enhanced safety. Microcantilever-based sensors reduce the overall size of the measurement system as well as enhance the measurement...
In this paper we proposed a new approach to actuate and readout of resonating piezoelectric sensors to realize concept of self-sensing. In the circuit three transistors are used to differentiate between actuation and readout modes. We evaluated a given piezoelectric resonating sensor and the proposed circuit analytically and with simulations. We also evaluated the applicability of our circuit for...
This paper presents a new high sensitive micromechanical silicon cantilever beam with a u-shape integrated strain gauge on its surface for optimizing piezo resistive read out. To improve the sensitivity of micro cantilever sensors, this study analyses and compares the deflection, vibration characteristics and maximum stress of rectangular and trapezoidal profile micro cantilevers. Therefore a new...
In the article the influence of adsorbed layer on elastic constants and surface stress are considered in MEMS and NEMS. The calculated results are shown on example of silicon resonator. Comparison between theoretical and calculated results is shown.
In this paper, a first prototype of a multifunctional tactile sensor using ionic polymer metal composites (IPMCs) is proposed, designed, and tested. Two IPMC strips are used, one as an actuator and one as a sensor, both positioned in a cantilever configuration; working together they enable the system to detect the presence of a material in contact with it and to measure its stiffness. These sensing...
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