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We are developing novel ultra light-weight and high-resolution X-ray micro pore optics for space X-ray telescopes. Ni mirror chip for focusing and detecting X-rays is fabricated utilizing LIGA process (SR lithography and electroforming). In this time, in order to improve the detection efficiency of X-rays, fabrication process is improved. Especially, it keeps by liquid immersion from development process...
This paper reports the results of low-temperature flip-chip bonding of a vertical cavity surface emitting laser (VCSEL) on a micromachined Si substrate. Low temperature bonding was achieved by introducing surface activation by plasma irradiation into the flip-chip bonding process. After the surfaces of the Au electrodes of the VCSEL and Si substrate were cleaned using an Ar radio frequency (RF) plasma,...
We present a new approach for guided-wave optical switches based on square silicon planar hollow waveguides (PHW). A 1times2 MEMS optical switch is manufactured by inserting into the hollow planar waveguide a micromechanical cantilever beam switch at the junction of Y waveguides. The small dimension of hollow planar waveguides (20 mum wide and 20 mum deep) and of the beam (2 mum wide and 250 mum long)...
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