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We present a new approach for guided-wave optical switches based on square silicon planar hollow waveguides (PHW). A 1times2 MEMS optical switch is manufactured by inserting into the hollow planar waveguide a micromechanical cantilever beam switch at the junction of Y waveguides. The small dimension of hollow planar waveguides (20 mum wide and 20 mum deep) and of the beam (2 mum wide and 250 mum long)...
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