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A surface micromachining technique is proposed which significantly reduces the undesirable pattern following effect and prevents disturbance in subsequent layers of the structure. This modified lift off method starting from a flat surface embeds the base layer of microstructure in the substrate in order to maintain initial surface profile, and thus allows fabrication of subsequent layers to start...
Fluidized bed reactors are widely used in chemical engineering, but recently there is also increasing interest for processing particulate advanced materials in fluidized bed reactors. Examples include heat treatment, plasma-assisted surface treatment, etching, and coating. In this paper, a novel process for deposition of thin metallic and metal-nitride coatings on particulate substrates is reported...
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