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Optical transmission properties of subwavelength apertured waveguides on semiconductor substrates, particularly silicon, are studied. The waveguide design is optimized for maximum power throughput at telecommunication wavelengths.
Optical triplexers using thin WDM filters and lensed fibers on silicon bench were proposed. The fiber-to-fiber insertion losses were less than 1.2 dB, and the power variations at 1.31/1.49/1.55 mum ports were less than 0.7 dB at 100degC.
Summary form only given. In conclusion we have developed a low-temperature surface micromachining process that can be applied to various substrates such as Si, glass, and GaAs. We have demonstrated a tunable optical filter with a 60 nm tuning range near 1.5 /spl mu/m, and a transmission linewidth of 5 nm. This device might find applications in WDM systems and optical sensing.
Summary form only given. Presently GaAs metal semiconductor metal (MSM) photodetectors are used for most optical data link systems operating at about 780-850 nm. The MSMs are generally preferred over p-i-n structures due to their low capacitance per unit area. To compare the effect of different substrates for MSM detectors, identical 80 micron-diameter devices were fabricated both on Si and Si-on-insulator...
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