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An electromechanical tunable grating was fabricated by micromachining a GaN crystal grown on a Si substrate. The tunable grating consisted of an expandable freestanding grating and an electrostatic comb-drive actuator. In order to compensate the residual stress of the GaN crystal grown on the Si substrate, crystallization stress of an HfO2 layer deposited on the GaN crystal was utilized. The freestanding...
We describe the fabrication and performance of micro-mirror for silica waveguides on silicon substrate. The micro-mirror consists of four facets, which is produced by wet-etching a pyramid-shaped pit on the backside of the Si-substrate and transferring it to silica waveguide by dry-etching. This mirror couples waveguide light normal to waveguide plane. We developed a trench-filled 0.45Delta% Ge-doped...
A MEMS batch assembly process for fabricating small form factor optical pickup head is proposed to minimize the complexity of assembly. Electrical and optical components are sealed in a chamber. A silicon optical bench with a packaged laser diode and crystalline-plane mirrors is demonstrated.
An optical scanner with a deformable mirror is fabricated using SOI wafer. A 1 mum thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80 V. The...
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