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Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 992 - 1001
Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 809 - 822
Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 992 - 1001
Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 809 - 822