Search results
Journal of Microelectromechanical Systems > 2014 > 23 > 3 > 661 - 671
Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 992 - 1001
Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 809 - 822
Journal of Microelectromechanical Systems > 2014 > 23 > 3 > 661 - 671
Journal of Microelectromechanical Systems > 2010 > 19 > 4 > 992 - 1001
Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 809 - 822