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This paper reports a MEMS gyroscope that is driven by the rotating carrier's angular velocity. The structure and fabrication are introduced in the paper. The silicon processing and simulating of the sensing element are studied. We use coventor ware to simulate structure. In simulation, the first modal frequency we obtained is 200.49Hz, and the normal static capacitance is 18.7pf from electrode to...
In this work we present an experimental study of the electromechanical behavior of suspended, taut, single walled carbon nanotubes (SWCNTs). A novel top-down fabrication process was developed in order to integrate the suspended SWCNTs into silicon MEMS structures fabricated using conventional micro-machining techniques. The resonant response of suspended SWCNTs under a time-varying electric field...
In this paper we study the impact of two sacrificial layers on the final residual stress of thin gold films. In particular, we compare a typical photoresist layer (Shipley SC1827) to single-crystalline silicon. We fabricate and measure cantilever beams on both sacrificial layers and study their residual stresses by analyzing the final displacement profile of the released beams. All samples were fabricated...
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