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In this work we present an experimental study of the electromechanical behavior of suspended, taut, single walled carbon nanotubes (SWCNTs). A novel top-down fabrication process was developed in order to integrate the suspended SWCNTs into silicon MEMS structures fabricated using conventional micro-machining techniques. The resonant response of suspended SWCNTs under a time-varying electric field...
This study presents a novel capacitive-type Z-axis (out-of-plane) accelerometer implemented on SOI wafer. This accelerometer contains special designed gap-closing differential sensing electrodes. The present Z-axis accelerometer has four merits, (1) mass of the proof mass is increased by combining both device and handle silicon layers of SOI wafer, (2) the sensitivity is improved by the gap-closing...
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