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The MEMS Si thermal convective inclinometer without solid proof mass has many advantages such as more robust and immune to vibration shocks compared with traditional inclinometer. In this paper, a 3D parametric model of this kind of inclinometer has been setup. The influences of different airflow velocity under high environmental temperature have also been considered to study how they affect the sensitivity...
This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600??C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The...
This paper introduces a class of single crystal silicon micro-scale differential scanning calorimeters for rapid detection and thermal characterization of energetic materials. The suspended membrane micro hotplates have fast time response and high sensitivity, which enables thermal measurements of melting endotherms and deflagration exotherms in energetic materials such as RDX and TNT. The potential...
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