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In this paper, the design and analysis of diaphragm based Micro-Electro-Mechanical Systems (MEMS) sensor for environmental applications is presented. Performance parameters like the maximum induced stress, deflection and sensitivity of the diaphragms have been compared using the INTELLISUITE software. In order to increase the sensitivity of pressure sensor, the membrane needs to be either thin or...
Capacitive touch MEMS devices have better performance and higher sensitivity than conventional capacitive MEMS device. Because the diaphragm of these capacitive MEMS device touches the substrate in the operation, it also can withstand large over distortion, thus it is very suitable for industrial applications. However, hysteresis has been observed on some devices, especially for high sensitivity devices,...
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