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In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on a square and slotted shaped diaphragm as piezoresistor. The slot was added into the design of the square diaphragm to reduce the residual stress and...
This paper demonstrates the sensitivity analysis of a piezotransistor-embedded microcantilever sensor facilitated as platform for stress sensing applications. To enhance sensitivity and detection capability, different channel width-to-length aspect ratio transistors are designed and characterized under the mechanical strain at different gate bias. Higher sensitivity is found for the devices with lower...
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