The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this work, the authors present the new design of MEMS high-sensitivity piezoresistive cantilever. The prospect is to develop the tactile sensor for space mission. The finite element method with parametric design, carried out using CoventorWare2008, was applied to obtain the most advantageous performance by optimizing shape and geometrical dimension of both cantilever and piezoresistor. The sensor...
In this paper, fully coupled electro-thermal simulation of a micro pirani gauge is presented. The simulation was carried out using CFD-ACE+ software, based on Finite Volume Method (FVM) for multi-disciplinary modeling. Temperature coefficient of resistance (TCR) of silicon was taken into account for solving the joule heating and heat transfer equations. The influence of physical parameters on the...
This paper presents improved design, fabrication, and characterization of a small array of silicon microcantilever heaters with integrated piezoresistors. The fabricated microcantilever arrays are made from single crystal silicon with selective doping such that parasitic bending and electromigration can be suppressed during high temperature operation. Detailed characterization was performed to test...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.