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The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption...
In this work, the authors present the new design of MEMS high-sensitivity piezoresistive cantilever. The prospect is to develop the tactile sensor for space mission. The finite element method with parametric design, carried out using CoventorWare2008, was applied to obtain the most advantageous performance by optimizing shape and geometrical dimension of both cantilever and piezoresistor. The sensor...
Capacitive touch MEMS devices have better performance and higher sensitivity than conventional capacitive MEMS device. Because the diaphragm of these capacitive MEMS device touches the substrate in the operation, it also can withstand large over distortion, thus it is very suitable for industrial applications. However, hysteresis has been observed on some devices, especially for high sensitivity devices,...
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