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A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. The conceptual scheme used for the biaxial resonant accelerometer...
A miniaturized semiconducting metal oxide NO2 gas sensor with integrated micro heater is reported in this paper. The sensor has the size of 1×1×0.4 mm3 and detects NO2 based on the electrical conductance change of porous nanoparticles WO3 thin film, which is deposited on the interdigitated Pt electrodes. Integrated micro heater designed to provide the operating temperature above...
In this work we present an experimental study of the electromechanical behavior of suspended, taut, single walled carbon nanotubes (SWCNTs). A novel top-down fabrication process was developed in order to integrate the suspended SWCNTs into silicon MEMS structures fabricated using conventional micro-machining techniques. The resonant response of suspended SWCNTs under a time-varying electric field...
This paper reports a monolithically integrated CMOS-MEMS three-axis capacitive accelerometer with a single proof mass. An improved DRIE post-CMOS MEMS process has been developed, which provides robust single-crystal silicon (SCS) structures in all three axes and greatly reduces undercut of comb fingers. The sensing electrodes are also composed of the thick SCS layer, resulting in high resolution and...
This paper presents improved design, fabrication, and characterization of a small array of silicon microcantilever heaters with integrated piezoresistors. The fabricated microcantilever arrays are made from single crystal silicon with selective doping such that parasitic bending and electromigration can be suppressed during high temperature operation. Detailed characterization was performed to test...
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