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This study reports the design and implementation of a novel micromachined microphone. The design of the microphone is based on the well-known two-poly processes. The design as shown in Fig.1 has four merits, (1) rigid-diaphragm formed by the rib-reinforced poly-Si as acoustic wave receiver and moving-electrodes, (2) flexible-spring formed by thin poly-Si as diaphragm supporter, (3) rigid-diaphragm...
The paper is dedicated to a cantilever sensor design/fabrication optimization which is related to a no curved structure, before bimolecular functionalization and immobilization. The advantage of cantilever arrays is not only their small size but also their suitability for mass production, which permits economically realistic, disposable sensors. The simulations of the cantilever in the static mode...
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