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2009 International Semiconductor Conference > 2 > 545 - 548
Journal of Microelectromechanical Systems > 2007 > 16 > 5 > 999 - 1014
2009 International Semiconductor Conference > 2 > 545 - 548
Journal of Microelectromechanical Systems > 2007 > 16 > 5 > 999 - 1014