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A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. The conceptual scheme used for the biaxial resonant accelerometer...
In recent year, capacitive silicon micro-accelerometer still is the research hotspot. How to enhance the detection accuracy and further expand its application fields is the emphases and difficulty, which's key point is to reduce noise. The noise mainly includes mechanical thermal noise and detection circuit noise. The weak signal detection ways are adopted to reduce the noise, to guide the design...
This paper reports a 2nd order electromechanical sigma-delta accelerometer system. Accelerometer is fabricated using dissolved wafer process, and has a structural thickness of 15 mum. A large proof mass is used to decrease the mechanical noise of the accelerometer and 306 fingers per side are used to increase the sensitivity and operation range of the accelerometer. In order to obtain a high resolution,...
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