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We report the theory, design methodology and experiment of an electrostatically actuated silicon-plate Phononic Bandgap (PnBG) crystal architecture. This architecture is a high-order distributed mechanical system comprised of a two-dimensional PnBG crystal which is truncated to finite periodicity and suspended from the substrate utilizing tethers. Electrostatic actuation mitigates the use of piezoelectric...
This paper considers mechanical stress and strain in a piezoresistive cantilever sensor under surface stress loading, which is the loading condition that occurs in biochemical sensing applications. Finite element simulations examine the piezoresistor sensitivity due to changes in cantilever length, width, and thickness, and piezoresistor size, location, and depth. A few unexpected results are found...
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