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Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 132 - 144
Journal of Microelectromechanical Systems > 2009 > 18 > 2 > 396 - 404
Journal of Microelectromechanical Systems > 2012 > 21 > 1 > 132 - 144
Journal of Microelectromechanical Systems > 2009 > 18 > 2 > 396 - 404