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This paper focuses on the design and analysis of RF MEMS metal contact switch with a π shaped cantilever beam operating in the frequency range from 4 to 12 GHz. The topology of the design is a modified cantilever beam to achieve a low pull-in voltage. The design was analyzed as a metal contact switch to ensure its operation from DC onwards. The design is modified in terms of thickness of the beam,...
This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS single-pole double-throw (SPDT) switch with low sensitivity to stress gradients. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and excellent microwave performance to >30 GHz. To our knowledge, this is the smallest high-performance...
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